World-Class Resources > Metrology Labs > Analytical & Characterization Techniques > Thermo VG Theta Probe XPS

• Spatial resolution < 50 µm
• Angle resolved XPS using 2-D multi-channel detector
• Computer controlled automated analysis
• Chemical state spatial mapping

Typical applications: ultra thin films; surface scans – non-destructive; small area characterization; depth information using ARXPS

XPS Data