World-Class Resources > Metrology Labs > Analytical & Characterization Techniques > JEOL 2010 STEM

• Beam - 200 keV
• LaB6 source
• Probe size - 1 nm
• Sample size - TEM grid - 3 mm
• Resolution – 2.5Å spatial, 1.4 Å lattice
• STEM operation
• Electron Energy Loss Spectrometer (EELS) 
• Energy-filtered imaging
• Cryogenic specimen holder 

Typical applications: crystalline structure, lattice defects; thin layer metrology, process-induced defects, liners, gate oxides; novel devices, III-V materials; carbon nanotubes

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