World-Class Resources > Metrology Labs > Analytical & Characterization Techniques > Digital Instruments Dimension 3100 AFM

• High resolution surface imaging
• Typical resolution 0.5 nm 
• 300mm wafer capability
• Liquid samples
• Scanning capacitance
• Kelvin probe force microscopy
• Conductivity mapping

Typical applications: surface roughness; surface material properties; etch feature measurements; defect visualization

Scanning Capacitance Microscopy data of calibration sample

Topography image of HOPG (Highly oriented pyrolitic graphite)

AFM is able to distinguish different layers of graphite. The normal thickness of single layer graphite is 0.34 nm.