World-Class Resources > CNSE Wafer Processing Research & Development > Implants > High Current
High Current
This uses the following sources:
- AsH3
- PH3
- BF3
- Xenon
- CO2
- N2
- GeF4
Species Range: 1e13 - 3e16 tool spec, 1e14-5e15 typical
Energy Range: 0.2 keV - 60keV (single charge)
Tilt: 45 degree max
Varian 900XP Medium Current Ion Implanter
This tool uses the following sources:
- AsH3
- PH3
- BF3 Enriched
- Xenon
- SiF4, Optional - not currently on tool
- SbF3
- InCl3
Species Range: 3e11 - 1e14 tool spec, 1e12-1e14 typical
Energy Range: 2keV - 300keV (single charge), 900keV max (triple charge)
Tilt: 45 degree max