World-Class Resources > CNSE Wafer Processing Research & Development > Analytical Services > TEM

Capabilities:

• Probe size (field emission) - 0.5 nmResolution - 1.9Å spatial, 1.02 Å lattice
• Gatan Imaging Filter for EFTEM Spectroscopy 
• Energy Dispersive X-ray Spectroscopy (EDS) 
• Electron Energy Loss Spectroscopy (EELS) Specialty Holders 
• Cryogenic specimen holder 
• Nanofactory TEM-STM holder

Typical Applications:

• Ultra high magnification imaging
• Lattice fringes - phase identification
• Examination of crystal quality/ defect density

Typical data:

Lattice resolution image of annealed HfOx/SiOx/Si stack

Single Crystal Silicon One Orientation: 110	Single crystal Gold One Orientation: 100

Compositional mapping using EDS