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AES
Perkin-Elmer PHI 660 Auger Electron Spectrometer
Provides depth profiles and 2-dimensional mapping of elemental compositions
- LaB6 source, analytical spot size ~ 250 nm
- Sensitivity range - 0.05-1.0 atom %
- Sputter ion gun for composition depth profiling
- Maximum sample size - 2.5 cm diameter, 1 cm thick
Typical Data: