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Thin Film & Growth
Most of the tools listed below can also be used to process 150mm, 100mm, and 75mm wafers:
  • 10 Specialized 200mm Wafer CVD Systems
  • 5 Commercial Stand-Alone 200mm Wafer CVD Tools
  • 2 Specialized 200mm Wafer CVD System Equipped with Real-Time, In-Situ, Mass Spectral and Infrared Diagnostics Capabilities
  • 1 Electrolytic Plating System
  • 1 LAM Quad 480 CVD Cluster Tool
  • 1 Quester TEOS Dielectric Deposition Tool
  • 1 CVC Connexion PVD Cluster Tool
  • 1 TEL 4 chamber CVD Cluster Tool
  • 1 Modified Novellus MB2 PVD/CVD Cluster Tool
  • 1 tube furnace for poly-Si growth
  • 1 tube furnace for Silicon di-Oxide growth
  • 1 tube furnace for Silicon nitride growth
  • 1 RTP furnace
  • 1 E-beam evaporation system
  • 1 3 MeV Tandem accelerator 
  • 1 Varian 400 keV ion implanter
  • 1 Danfisyk 150 keV ion implanter