World-Class Resources > 200mm Wafer Fabrication > Tools > Etch & Planarization
Etch & Planarization
Most of the tools listed below can also be used to process 150mm, 100mm, and 75mm wafers:
- 1 Plasma-Therm versalok 200mm wafer 2 chamber ICP etch tool
- 4 wet benches for wet etch and wafer cleaning
- 1 O2-plasma strip system
- 1 AMAT metal etch system
- 2 Strasbaugh dual platten CMP tools