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RF MEMs

CNSE has developed prototype RF MEMs devices for use in RFID and Power Harvesting applications.

RF MEMs Die
CAD Layout of an RF MEMs Die
With discrete components and LC Tank
 
Physical Resonator
 Physical Resonator
Physical Resonator (CAD layout and actual device)

Variable Capacitor
 Variable Capacitor
Variable Capacitor (CAD layout and actual device)

Integrated MEMs
 Integrated MEMs
Integrated MEMS LC tank part of a Colpitts Oscillator