World-Class Resources > 200mm Wafer Fabrication > CNSE Expertise > Microfluidics
Wafer-scale Fabrication and Packaging of Biochips
CNSE has developed an expertise in the development and fabrication of SU8 based micro channel networks. These devices can be integrated into micro devices for fast drug delivery and cell transport. Both single and double layered SU8 channels have been developed by CNSE without the use of sacrificial layers or wafer bonding.
Double layer SU8 micro channels on a silicon substrate
|A and B, Cross section of the bottom layer in a double-layered |
SU8TM embedded microchannel.
B, Cross section of the top layer.
C, Image sequence of one cell transport experiment
(from left to right in time order).
Microchannels of the top and bottom layers are connected
at the chamber in the center.